Optical element having a reflected light diffusing function and a polarization separation function and a projection display device

ABSTRACT

An optical element, includes: a diffractive functional layer which diffracts at least part of incident light; and a grid formed on a first surface of the diffractive functional layer, the grid including a plurality of fine wires and having a polarization separation function; wherein the optical element reflects a part of the incident light while transmitting another part of the incident light, the first surface of the diffractive functional layer including: a plurality of first regions; a plurality of second regions, a height thereof relative to a second surface of the diffractive functional layer being different from that of the first regions, the second surface being an opposite surface to the first surface; and a step provided at a border between the first regions and the second regions.

The entire disclosure of Japanese Patent Application Nos: 2007-151225,filed Jun. 7, 2007 and 2008-118149, filed Apr. 30, 2008 are expresslyincorporated by reference herein.

BACKGROUND

1. Technical Field

Several aspects of the present invention relate to an optical element aswell as to a projection display device.

2. Related Art

Wire-grid polarizers are known as one of the optical elements providedwith a polarization separation function. These wire-grid polarizers havemultiple conductive fine wires arranged at a pitch shorter than thewavelength of light, and they reflect an incident light component thathas a polarization axis parallel to the fine wires, while transmittinganother component that has a polarization axis orthogonal to the finewires.

Wire-grid polarizers are formed of an inorganic substance and thereforeexcel in light resistance. For this reason, there are attempts to applythese wire-grid polarizers to projection display devices such asprojectors which require to polarize and separate high luminance light(refer to JP-A-2002-372749). FIG. 22 is a schematic drawing illustratingan example of a configuration of a projection display device using twowire-grid polarizers 5. As shown in this drawing, a liquid crystaldevice 10 is interposed between the two wire-grid polarizers 5, andlight is incident to the liquid crystal device 10 from one of thewire-grid polarizers 5. This incident light is converted to displaylight by the polarization separation function of the wire-gridpolarizers 5 at both the entry and exit side, as well as by thepolarization conversion function of the liquid crystal device 10. Thedisplay light is then projected to a screen 61 through a projection lens51.

In the above structure, however, the specular reflection of the light byone of the wire-grid polarizers 5 arranged on the exit side of theliquid crystal device 10 occurs. Therefore, the reflected intense lightirradiates part of the liquid crystal device 10. This results inproblems of the reduced lifetime or unstable operation of the liquidcrystal device 10.

SUMMARY

An advantage of the invention is to provide an optical element having areflected light diffusing function and a polarization separationfunction.

According to a first aspect of the invention, an optical elementincludes a diffractive functional layer which diffracts at least part ofincident light, and a grid formed on a first surface of the diffractivefunctional layer, the grid including a plurality of fine wires andhaving a polarization separation function. Here, the optical elementreflects a part of the incident light while transmitting another part ofthe incident light, and the first surface of the diffractive functionallayer includes a plurality of first regions, a plurality of secondregions, and a step provided at a border between the first regions andthe second regions. The height of the plurality of second regionsrelative to a second surface of the diffractive functional layer isdifferent from that of the first regions, and the second surface is asurface opposite to the first surface.

In this structure, a plurality of relief patterns composed of the firstregions and the second regions is distributed on the first surface ofthe diffractive functional layer. The distribution of relief patternsallows the diffractive functional layer to diffract the incident light,so that the light is diffused to directions different from the directionof incidence.

An incident light component that has a polarization axis parallel to thefine wires is reflected at the grid, and another component that has apolarization axis orthogonal to the fine wires is transmitted.Consequently, with the optical element, the incident light beam isseparated into a reflected light beam and a transmitted light beam, andthe reflected light beam is diffused out.

In this case, the height relative to the second surface in the firstregions of the optical element may be different from that of the secondregions by (2m+1)λ/4n, where m being an integer greater than or equal to0, λ being a wavelength of the incident light, and n being a refractionindex of the medium over the optical element.

In this structure, the height difference of the first regions and thesecond regions being (2m+1)λ/4n maximizes the diffusion effect of thereflected light by the diffractive functional layer. Since the diffusioneffect of the transmitted light is not necessarily the highest at thispoint, the intensity of 0^(th) order diffraction light of the lighttransmitted through the diffractive functional layer stays almost intactwhile reducing the diffusion effects on the transmitted light.Consequently, with the optical element, the incident light beam isseparated into a reflected light beam and a transmitted light beam, andat the same time, the reflected light is diffused out while thetransmitted light is not.

In this case, the height relative to the second surface in the firstregions of the optical element may be different from that of the secondregions by (m+1)λ/(N−1), where m being an integer greater than or equalto 0, λ being the wavelength of the incident light, and N being arefraction index of the diffractive functional layer.

This structure minimizes the diffusion effects on the transmitted light.

In this case, a plane defined by the height of the first regions and aplane defined by the height of the second regions may be in parallel.

In this structure, the light simultaneously enters the first regions aswell as the second regions at the same angle. Therefore, the grid iseasily formed on the diffractive functional layer with photolithography.

In this case, the first regions may be irregularly arranged on the firstsurface.

With this structure, relief patterns composed of the first regions andthe second regions are irregularly distributed on one surface of thediffractive functional layer, without rules or statistical biases.Therefore, the incident light may be diffused into various directions,thereby extending the diffusion range of the reflected light originatingfrom the optical element.

In this case, the optical element according to the first aspect of theinvention may further include a plurality of unit patterns, each of theunit patterns including the plurality of first regions and the pluralityof second regions arranged in a specified irregular distribution.

This structure allows a photomask used for manufacturing the diffractivefunctional layer to have a structure in which each mask patternequivalent to the above unit pattern is arranged in repetition, therebymaking the forming of the photomask as well as the manufacturing of theoptical element easier.

In this case, directions of the adjacent unit patterns may be differentfrom each other.

Such a structure prevents nonuniform diffusion of the reflected light,the nonuniformity being caused by the repetition cycle of the unitpatterns.

In this case, a periphery of the first regions and a periphery of thesecond regions may respectively include a straight line, and the finewires may be arranged at an angle to the straight line.

This structure makes the fine wires unparallel to the step provided atthe border between the first regions and the second regions, therebyavoiding defects in which the fine wires arranged in the vicinity of thesteps become unstable.

In this case, the diffractive functional layer may be formed of amaterial different from that of the grid, the material havingtransparency.

Such a structure allows the optical element, to let out the lightcomponent that has transmitted through the grid, making the opticalelement semi-transmissive-reflective.

In this case, the optical element may further include an adhesive layerformed between the diffractive functional layer and the grid, and thisadhesive layer may be formed with a material different from that of thediffractive functional layer and that of the grid. Moreover, an adhesivestrength between the diffractive functional layer and the adhesivelayer, as well as an adhesive strength between the grid and the adhesivelayer may be higher than that of between the diffractive functionallayer and the grid.

In such a structure, the adhesiveness between the grid and thediffractive functional layer is improved by having the adhesive layertherebetween.

According to a second aspect of the invention, an optical elementincludes a diffractive functional layer which diffracts at least part ofincident light, and a grid formed on a first surface of the diffractivefunctional layer, the grid including a plurality of fine wires andhaving a polarization separation function. Here, the optical elementreflects a part of the incident light while transmitting another part ofthe incident light, and the first surface of the diffractive functionallayer includes a plurality of regions and a step provided at a borderbetween the plurality of regions. The plurality of regions has adifferent height relative to a second surface of the diffractivefunctional layer, and the second surface is a surface opposite to thefirst surface.

In this case, the plurality of regions having a different height mayhave a distribution within the optical element, and the difference ofheight relative to the second surface of the optical element in theplurality of regions having a different height may be (2m+1)λ/4n, wherem being an integer greater than or equal to 0, λ being a wavelength ofthe incident light, and n being a refraction index of the medium overthe optical element.

In this case, the plurality of regions having a different height mayhave a distribution within the optical element, and the difference ofheight relative to the second surface of the optical element in theplurality of regions having a different height may be (m+1)λ/(N−1),where m being an integer greater than or equal to 0, λ being awavelength of the incident light, and N being a refraction index of theoptical element.

In these structures described according to the second aspect of theinvention, different heights are distributed in an appropriate ratio,the heights corresponding, for instance, to the wavelength bands at thecenter and at both edges of the incident light. Consequently, in thesestructures, the specularly reflected light is reduced compared to astructure including a height complying only with a specified wavelength.

According to a third aspect of the invention, a projection displaydevice includes a liquid crystal device, a projection lens, and anoptical element arranged at an optional position in an optical path fromthe liquid crystal device to the projection lens. Here, the opticalelement includes a diffractive functional layer which diffracts at leastpart of incident light, and a grid formed on a first surface of thediffractive functional layer, the grid including a plurality of finewires and having a polarization separation function. The first surfaceof the diffractive functional layer includes a plurality of firstregions, a plurality of second regions, and a step provided at a borderbetween the first regions and the second regions. The plurality ofsecond regions has a height relative to a second surface of thediffractive functional layer and this height is different from that ofthe first region.

In this structure, the light transmitted through the liquid crystaldevice enters the optical element, and a light component is transmittedthrough the optical element, the component having a polarization axisorthogonal to the fine wires of the grid, thereafter entering theprojection lens. Consequently, using the polarization separationfunction of the optical element allows display contents of the liquidcrystal device to be projected through the projection lens.

Moreover, since the light reflected by the optical element is diffusedby the polarization separation function of the diffractive functionallayer, it is possible to prevent optical malfunctions originating fromthe reflected light striking on part of the liquid crystal device.

In this case, the height relative to the second surface in the firstregions of the optical element may be different from that of the secondregions by (2m+1)λ/4n, where m being an integer greater than or equal to0, λ being a wavelength of the incident light, and n being a refractionindex of the optical element.

This structure maximizes the diffusion effect of the light reflected bythe diffractive functional layer of the optical element. It is thereforepossible to prevent optical malfunctions occurring if the lightreflected from the optical element concentrates on part of the liquidcrystal device. Since the diffusion effect of the transmitted light isnot necessarily the highest at this point, the intensity of 0^(th) orderdiffraction light of the light transmitted through the diffractivefunctional layer remains unaffected, thereby reducing the diffusioneffects on the transmitted light. Consequently, there is an increase inthe proportion of light contributing to the display and beingtransmitted through the projection lens, with respect to the lighttransmitted through the liquid crystal device.

In this case, the projection display device may further include a prismarranged at an optional position in the optical path from the liquidcrustal device to the optical element.

In this configuration, the course of light transmitted through theliquid crystal device can be changed by prism. Moreover, light beamstransmitted through different liquid crystal devices through differentoptical paths can be combine by the prism, and the combined light beambecomes incident to the optical element.

In this case, the projection display device may further include alight-collecting lens arranged at an optional position in the opticalpath from the optical element to the projection lens.

In this configuration, the larger proportion of light transmittedthrough the optical element is incident to the projection lens, therebyincreasing the light use efficiency.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIG. 1A is a perspective view of an optical element according to anembodiment, and FIG. 1B is a perspective view illustrating the shape ofa diffractive functional layer.

FIG. 2A is a sectional view along the X-Z plane of the optical elementreferred to in FIG. 1A, and FIG. 2B is a sectional view magnifying apart of FIG. 2A.

FIG. 3 is a schematic view for describing a function of the opticalelement.

FIGS. 4A and 4B are graphs indicating characteristics of transmittedlight in the optical element, where FIG. 4A indicates wavelengthdependence of transmittance and FIG. 4B indicates wavelength dependenceof contrast.

FIG. 5 is a drawing illustrating an example of a unit patternarrangement of the optical element.

FIG. 6 is a flowchart of a method for manufacturing the optical element.

FIGS. 7A to 7C are sectional views of manufacturing processes of theoptical element.

FIGS. 8A to 8C are sectional views of the manufacturing processes of theoptical element.

FIGS. 9A and 9B are graphs illustrating a relationship between athickness of an anti-reflection film and a reflected light intensity atan interface between resist and the anti-reflection film, in the case ofdepositing the resist on the anti-reflection film.

FIG. 10 is a schematic drawing illustrating an optical system of aprojector.

FIG. 11 is a drawing illustrating an example of a configuration of atransmission axis of the optical element and a wire-grid polarizer.

FIGS. 12A and 12B are drawings illustrating a diffractive lightintensity distribution provided by the optical element.

FIG. 13 is a drawing illustrating an example of a pattern including afirst region and a second region in the diffractive functional layer.

FIG. 14 is a drawing illustrating the diffractive light intensitydistribution originating from the optical element having a pattern shownin FIG. 13.

FIG. 15 is a drawing illustrating the diffractive light intensitydistribution originating from the optical element according to amodification.

FIG. 16 is a schematic drawing illustrating an optical system of aprojector provided with three liquid crystal devices.

FIG. 17 is a schematic drawing illustrating an optical system of aprojector according to a modification.

FIG. 18 is a sectional drawing illustrating a state in which a SiN layeris deposited on the optical device.

FIG. 19 is a schematic drawing illustrating an optical system of aprojector that has a light-collecting lens.

FIGS. 20A to 20C are drawings illustrating examples of the shapes of theminimum unit of the first region and of the second region in thediffractive functional layer, with respect to the direction in whichfine wires are laid out forming a grid.

FIG. 21 is a perspective view of a projector as a projection displaydevice.

FIG. 22 is a schematic drawing illustrating an example of aconfiguration of a projection display device using the wire-gridpolarizer.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Embodiments of an optical element as well as of a projection displaydevice will now be described with reference to the accompanyingdrawings. Components in the drawings shown hereafter are provided withan appropriate scale size and a ratio different from the actual ones, sothat those components will be sufficiently large to be recognized in thedrawings.

A. An Optical Element

FIG. 1A is a perspective view of an optical element 1 according to anembodiment, and FIG. 2A is a sectional view of the optical element 1along the X-Z plane. The optical element 1 includes a base 6 formed withmaterials such as glass, a diffractive functional layer 4 arranged onthe base 6, and a grid 2 arranged on the diffractive functional layer 4.FIG. 1A is a magnification of a part of the optical element 1, while theactual optical element has similar successive structures in a widerrange of the X-Y plane.

FIG. 1B is a perspective view illustrating the shape of the diffractivefunctional layer 4, with the grid 2 from FIG. 1A not shown. Thediffractive functional layer 4 is formed with a polymer that istransparent to incident light, and multiple relief patterns are formedon one of the surfaces (hereafter also referred to as “first surface”).This first surface includes a plurality of first regions 4 a and aplurality of second regions 4 b. The height of the second regions 4 brelative to another surface 4 c (hereafter also referred to as “secondsurface 4 c”) of the diffractive functional layer 4 is different fromthe height of the first regions 4 a, the second surface 4 c being asurface that contacts the base 6. In this embodiment, the second regions4 b are higher than the first regions 4 a. Steps 8 are provided in theborders between the first regions 4 a and the second regions 4 b. Aheight g of the steps 8 (FIG. 2A) are set to be smaller than thewavelength of the incident light. Moreover, the steps 8 areapproximately vertical to the first regions 4 a and the second regions 4b. In other words, the section of the diffractive functional layer 4 isapproximately rectangular, i.e. the section has the shape of rectangularwaves.

The first regions 4 a and the second regions 4 b are arranged at random(irregularly), and those regions are either squares or shapes like thosesquares being irregularly pieced placed lengthwise and crosswise in theX-Y plane. Here, the minimum size of the first regions 4 a and thesecond regions 4 b (i.e. the length of one side of the square) δ asshown in FIG. 2A is longer than a wavelength λ of the incident light. Incase of using the diffractive functional layer 4 for visible light, theδ is set to, for instance, 2 μm. The first regions 4 a and the secondregions 4 b are planes parallel to each other.

As shown in FIG. 1A, the grid 2 are actually formed on the first surfaceof the diffractive functional layer 4 (i.e. on the first regions 4 a andon the second regions 4 b). The grid 2 is composed with multiplealuminum fine wires that are parallel to each other. One of the straightperiphery lines of the first regions 4 a as well as one of the secondregions 4 b are in parallel with these fine wires. The arranged pitch d(FIG. 2A) of the fine wire is shorter than the wavelength λ of theincident light, and is set to, for instance, 140 nm. For the convenienceof description, the number of fine wires drawn in FIG. 1A is smallerthan actual.

FIG. 2B is a sectional drawing that magnifies a part of FIG. 2A. Asshown in this drawing, the grid 2 is sealed by the sealing layer 3formed of materials such as SiO₂ or SiN, and spaces surrounded by thediffractive functional layer 4, the grid 2, and the sealing layer 3 arein a vacuum state.

An adhesive layer formed of a material different from that of thediffractive functional layer 4 and the grid 2 may be formedtherebetween. At this time, it is preferable that the adhesive strengthbetween the diffractive functional layer 4 and the adhesive layer, aswell as between the grid 2 and the adhesive layer be higher than theadhesive strength between the diffractive functional layer 4 and thegrid 2. In such a structure, the adhesive layer improves theadhesiveness between the grid 2 and the diffractive functional layer 4.Examples of the adhesive layer includes a dielectric thin film formed ofmaterials such as SiO₂.

FIG. 3 is a schematic view for describing functionalities of the opticalelement 1. FIG. 3A is a drawing illustrating the function of thediffractive functional layer 4, and FIG. 3B is a drawing illustratingthe function of the grid 2.

As shown in FIG. 3B, an incident light 80 entering the grid 2 has acomponent p which has a polarization axis parallel to the fine wires anda component s which has a polarization axis orthogonal to the finewires. The component p is reflected by the grid 2 and the component s istransmitted through the grid 2. The optical element 1 including the grid9 is provided with a polarization separation function, and the incidentlight 80 is separated to a reflected light 80 r and a transmitted light80 t that have different polarization statuses.

In the optical element 1 shown in FIG. 3A, the black regions areequivalent to the first regions 4 a, and the white regions areequivalent to the second regions 4 b. A plurality of relief patternsshaped by the first regions 4 a and the second regions 4 b isdistributed on the first surface of the diffractive functional layer 4(FIG. 1B). The diffractive functional layer 4 diffracts the incidentlight 80 with this distribution of concaves and convexes, so as todiffuse the light to directions different from the direction ofincidence as shown in FIG. 3A. Specifically, the operation of thediffractive functional layer 4 allows diffusing both the reflected light80 r reflected by the grid 2 and the transmitted light 80 t transmittedthrough the grid 2. Moreover, as will be described later, the diffusioncharacteristics of the reflected light 80 r and the transmitted light 80t are adjustable.

In case of applying the optical element 1 to a transmission type device,the characteristics of transmitted light becomes an important factor.FIGS. 4A and 4B are graphs indicating characteristics of transmittedlight in the optical element, where FIG. 4A indicates a wavelengthdependence of transmittance and FIG. 4B indicates a wavelengthdependence of contrast. Here, the contrast is defined by a ratio of theintensity of the component s to the intensity of the component p (FIG.3B) of the light transmitting through the optical element 1. Asillustrated in the drawing, there is a tradeoff between thetransmittance and the contrast. For instance, when the contrast isincreased, then the transmittance slightly declines.

The diffusing effects (shown in FIG. 3A) of the reflected light 80 r andof the transmitted light 80 t are controlled by changing the height g ofthe steps 8 in the diffractive functional layer 4. If the incident light80 enters approximately vertically to the diffractive functional layer4, the highest diffusing effect of the reflected light 80 r is providedat a height gr of the steps 8, and the height gr is obtained by thefollowing formula (1).gr=(2m+1)λ/4n  Formula (1):

wherein m is an integer greater than or equal to 0, λ is the wavelengthof the incident light 80, and n is a refraction index of the surroundingmedium of the optical element 1. At the same time, the highest diffusingeffect of the transmitted light 80 t is provided at a height gt of thesteps 8, and the height gt is obtained by the following formula (2).gt=(2m+1)λ/2(N−1)  Formula (2):

wherein N is the refraction index of the diffractive functional layer 4.

The formulae (1) and (2) shows that the height gr and the height gt ofthe steps 8 that respectively provide the largest diffusing effect ofthe reflected light 80 r and of the transmitted light 80 t aredifferent. Therefore, the diffusion effect of the transmitted light 80 tis suppressed when the height of the steps 8 in the diffractivefunctional layer 4 is equal to the height gr.

For instance, if λ=600 nm, m=0, n=1.5, and N=1.5, then formula (1)evaluates to gr=100 nm, and formula (2) evaluates to gt=600 nm. Here, ifthe height g of the steps 8 is 100 nm (the height gr), then thediffusion effect of the reflected light 80 r is maximized by thediffractive functional layer 4. At this time, the height g is differentfrom the height gt (600 nm) at which the diffusing effect of thetransmitted light 80 t becomes the maximum, and therefore the diffusioneffect of the transmitted light 80 t does not increase. Consequently,the reflected light 80 r is diffused in a wide range and the diffusionof the transmitted light 80 t is suppressed, while separating theincident light 80 to the reflected light 80 r and the transmitted light80 t that have different polarization statuses.

The intermediate value of the gt in formula (2) is expressed as gt′, andthe gt′ satisfies the following formula (3).gt′=(m+1)λ/(N−1)  Formula (3):

The diffusion effect of the transmitted light 80 t is minimized, if theheight g of the steps 8 is set to gt′. In other words, setting theheight g of the steps 8 to the above-described height gt′ also diffusesthe reflected light 80 r and suppresses the diffusion of the transmittedlight 80 t, while separating the incident light 80 to the reflectedlight 80 r and the transmitted light 80 t that have differentpolarization statuses.

In the case of applying the optical element 1 to a specific displaydevice, the first regions 4 a and the second regions 4 b may be arrangedin an entire range totally at random. An alternative arrangement is asfollows. A unit pattern is formed, including the plurality of firstregions 4 a and the plurality of second regions 4 b arranged in aspecific random distribution, and a plurality of these unit patterns arerepetitively arranged. Here, the size of the unit pattern is setarbitrarily. For instance, the unit pattern may be a square, each sidebeing 400 μm. This structure allows a photomask used for manufacturingthe diffractive functional layer 4 to have a structure in which eachmask pattern equivalent to the above unit pattern is arranged inrepetition; thereby making the forming of the photomask as well as themanufacturing of the optical element easier.

Further, as shown in FIG. 5, the directions of the adjacent unitpatterns 1 u may be arranged to be different from each other. Referringto FIG. 5, an arrow inside each of the unit patterns 1 u indicates thedirection of each of the unit patterns 1 u. With such an arrangement,the cyclic nature of the diffractive functional layer 4 is reduced. As aresult, an inclination in the diffusing direction caused by the cyclesof repetition of the unit patterns 1 u is resolved, reducing thecoloring caused by the diffraction to an extent that does not causeproblems in practical use.

As described, in the optical element 1 including the grid 2 and thediffractive functional layer 4, the grid 2 separates the incident light80 into the reflected light 80 r and the transmitted light 80 t withdifferent polarization status, and, the diffractive functional layer 4diffuses the reflected light 80 r. In particular, by setting the heightg of the steps 8 equal to gr=(2m+1)λ/4n, the reflected light 80 r isdiffused in a wide range, while reducing the diffusion of thetransmitted light 80 t. In other words, this embodiment provides theoptical element 1 which has both the polarization separation functionand the light diffusion function, while reducing the diffusion of onlythe transmitted light. Moreover, the optical element 1 excels in lightresistance, since the polarization separation is carried out by the grid2 formed of aluminum fine wires.

B. Manufacturing Method of Optical Element

A method for manufacturing the optical element 1 will now be describedwith reference to FIGS. 6 through 8. FIG. 6 is a flowchart of the methodfor manufacturing the optical element 1, and FIGS. 7A through 8C aresectional views of manufacturing processes of the optical element 1. Thedescription will now be made along the flowchart of FIG. 6.

In step S1, the diffractive functional layer 4 is formed on the base 6.In this process, a diffractive functional material layer 4L, formed ofpolymer is first deposited on the base 6 formed of glass with athickness of 0.7 mm, using methods such as spin coating (FIG. 7A).Subsequently, regions that are equivalent to the first regions 4 a inthe diffractive functional material layer 4L are selectively exposedusing a photomask, and those regions are thereafter removed with wetdevelopment, so as to form the distributions of the first regions 4 aand of the second regions 4 b on the first surface of the diffractivefunctional material layer 4L. The difference of height between the firstregions 4 a and the second regions 4 b, i.e. the depth of portions beingetched in the diffractive functional material layer 4L is, for instance,100 nm. Moreover, this etching is carried out so that the first regions4 a and the second regions 4 b become parallel to each other.Consequently, the diffractive functional layer 4 is formed on the base 6(FIG. 7B).

In step S2, an aluminum film 2L is formed as a conductor film on thediffractive functional layer 4 with a thickness of 120 nm by methodssuch as sputtering.

In step S3, an anti-reflection film 32 is formed on the aluminum film 2Lwith methods such as vacuum deposition and sputtering. SiC andSiO_(x)N_(y):H, where x and y represent relative proportions, aresuitable as examples of the anti-reflection film 32. Indium tin oxide(ITO) may also be used. Anti-reflective efficiency largely depends onthe complex refractive index of materials. It is preferable that thereal part of the complex refractive index be, for instance, greater thanor equal to 1.4, and the imaginary part of the complex refractive indexbe between −0.1 and −1.5 inclusive. FIGS. 9A and 9B are graphsillustrating a relationship between a thickness of the anti-reflectionfilm 32 and a reflected light intensity at the interface between aresist 34 and the anti-reflection film 32, when the resist 34 (FIG. 7C)are deposited on the anti-reflection film 32. FIG. 9A exhibits a case inwhich SiC is used as the anti-reflection film 32, and FIG. 9B exhibits acase in which SiO_(x)N_(y):H is used as the anti-reflection film 32. Theoptimal film thickness of the anti-reflection film 32 varies inaccordance with film forming conditions, even if the material being useddoes not change.

In step S4, the resist 34 which includes an approximately planer surfaceis formed on the anti-reflection film 32 with methods such as spincoating (FIG. 7C).

Thereafter, in step S5, a laser interference exposure is carried out onthe resist 34, selectively exposing regions equivalent for forming thefine wires of the grid 2 (fine linear regions at a 140 nm pitch), so asto form the latent images of the fine wires (FIG. 8A). A deep ultraviolet (DUV) laser in continuous oscillation with a wavelength of 266 nmcan be used as a light source of the laser interference exposure, and anangle of incidence θL is for instance, 72 degrees. At this time, theanti-reflection film 39 formed at the under layer of the resist 34prevents defects of incomplete exposure caused by the aluminum film 2Lreflecting the laser light. Here, since the first regions 4 a and thesecond regions 4 b in the diffractive functional layer 4 are parallel toeach other, the laser light beams are incident to both regionssimultaneously at the same angle. Therefore, the laser light isirradiated evenly with an approximately the same power density onto thediffractive functional layer 4 that has relief patterns, thereby formingthe resist 34 and the grid 2 in a high precision with respect to shapesand sizes in the following steps. Moreover, in the resist 34, there is aslight film thickness fluctuation originating from the relief patternsof the diffractive functional layer 4. However, defects related to theshapes of patterns and are originating from the film thicknessfluctuation scarcely occurs, since the depth of these concaves andconvexes, i.e. the height g of the steps 8, is significantly small,ranging approximately between 100 nm to 200 nm. Therefore, it ispossible to form the latent image which is similar to the case offorming the resist on a planer surface.

In step S6, the resist 34 that underwent the laser interference exposureis developed. As a result, a fine linear pattern of the resist 34 isobtained at a 140 nm pitch (FIG. 8B).

In step S7, the aluminum film 2L is etched. Specifically, theanti-reflection film 32 and the aluminum film 2L are patterned with dryetching, using the pattern of resist 34 as a mask. In the subsequentstep S8, the resist 34 and the anti-reflection film 32 are removed. As aresult, the grid 2 formed of fine wires arranged at a 140 nm pitch isformed on the diffractive functional layer 4 (FIG. 8C).

A SiO₂ with a thickness of 30 nm formed between the aluminum film 2L andthe anti-reflection film 32 improves the etching rate of theanti-reflection film 32 to the aluminum film 2L, compared to the case ofresist 34. Therefore, the pattern of the resist 34 can be made shallow.This allows the forming of the resist 34 pattern with higher stability.

In step S9, a sealing layer 3 is formed on the grid 2. This process iscarried out by forming a layer formed of materials such as SiO₂ or SiNon the grid 2 under the vacuumed environment, with methods such aschemical vapor deposition (CVD) and vacuum deposition. As a result,spaces surrounded with the diffractive functional layer 4, the grid 2,and the sealing layer 3 are sealed in vacuumed status (FIG. 2B).

The optical element 1 having the diffractive functional layer 4 and thegrid 2 is thereby manufactured by the steps described above. In thismanufacturing method, the forming of the grid 2 on the surface of thediffractive functional layer 4 is more securely assured, since therelief patterns on the surface of the diffractive functional layer 4 arerectangular. In this embodiment, while the aluminum film 2L is used as aconductor film other metal materials such as silver and nickel may alsobe used. Moreover, while the polymer is used as a material for thediffractive functional layer 4, the grid 2 may also be formed, with themanufacturing method described above, on the diffractive functionallayer 4 formed on a quartz glass substrate with photolithography. Here,the photolithography is carried out, including processes such as:coating resist on the diffractive functional material layer 4L; exposingand thereafter developing the resist through a photomask; etching thediffractive functional material layer 4L using the remaining resist as amask; and removing the resist.

C. Projection Display Device

Examples of applying the optical element 1 to a projection displaydevice will now be described. FIG. 21 is a perspective view of aprojector 100 as a projection display device. The projector 100 includesa case 110 and a projection lens 51. In this device, light is emittedfrom an unillustrated built-in light source such as a mercury lamp, andthe light is projected forward from the projection lens 51 after thelight is modulated by the liquid crystal device 10 (FIG. 10) whichserves as an internally provided light valve.

FIG. 10 is a schematic drawing illustrating an optical system of theprojector 100. The dotted line in the drawing indicates an optical pathof light emitted from the light source in the projector 100. Thewire-grid polarizer 5, the liquid crystal device 10, the optical element1, and the projection lens 51 are arranged in this order in the opticalpath. In other words, the optical element 1 is arranged on the opticalpath anywhere between the liquid crystal device 10 and the projectionlens 51. The screen 61 is arranged ahead of the projection lens 51 inthe optical path. The projector 100 magnifies and projects, on thescreen 61, what is displayed by the liquid crystal device 10 through theprojection lens 51.

The wire-grid polarizer 5 includes multiple fine wires formed of aconductor, arranged in parallel on a transparent base. The wire-gridpolarizer 5 reflects a component of the incident light 80, the componenthaving a polarization axis parallel to the fine wires, whiletransmitting another component which has a polarization axis orthogonalto the fine wires. In other words, the wire-grid polarizer 5 has thepolarization separation function. However, this wire-grid polarizer 5 isan element in which the fine wires are simply formed on a planer base,and therefore do not have a function to diffuse the reflected light andthe transmitted light. The component of the incident light 80transmitting through the wire-grid polarizer 5 enters the liquid crystaldevice 10 almost without any diffusion.

The liquid crystal device 10 includes an element substrate and a countersubstrate that are adhered together through a sealing layer shaped as aframe, and liquid crystal is sealed in between the element substrate andthe counter substrate. The orientation status of this liquid crystal ischanged by a drive voltage impressed thereto through electrodes formedon counter surfaces of the element substrate as well as of the countersubstrate. The liquid crystal device 10 changes the polarization statusof the transmitted light, in accordance with the orientation status ofthe liquid crystal.

The light transmitted through the liquid crystal device 10 enters theoptical element 1. As described, the optical element 1 transmits thecomponent that has the polarization axis orthogonal to the fine wires ofthe grid 2 so as to let the component enter the projection lens 51, and,reflects the component that has the polarization axis parallel to thefine wires of the grid 2. It is preferable that the optical element 1 bearranged as far away from the liquid crystal device 10 as possible, inorder to reduce defects of the liquid crystal device 10 originating fromthe reflected light 80 r. FIG. 11 illustrates one example of configuringthe transmission axes in the optical element 1 and in the wire-gridpolarizer 5. In this embodiment, the transmission axes of the opticalelement 1 and of the wire-grid polarizer 5 are parallel to each other.

Here, in the diffractive functional layer 4 of the optical element 1,the height g of the steps 8 is equal to gr=(2m+1)λ/4n. As a result, thediffraction effect of the diffractive functional layer 4 provides thehighest diffusion effect of the reflected light 80 r, while thediffusion of the transmitted light 80 t is reduced.

FIGS. 12A and 12B are drawings illustrating a diffractive lightintensity distribution originating from the optical element 1. FIG. 12Aindicates the intensity distribution of the reflected light 80 r fromthe optical element 1 at the side of the liquid crystal device 10, andFIG. 12B indicates the intensity distribution of the transmitted light80 t at a side across the optical element 1 which is the plane ofsymmetry with respect to liquid crystal device 10. The left parts ofFIGS. 12A and 12B indicate the diffractive light intensity distributionat a X-Y plane. The darker the color is, the stronger the lightintensity. The right parts of FIGS. 12A and 12B indicate the diffractivelight intensity distribution at the position of the Y-axis.

A region 85 r in the left part of FIG. 12A is a region irradiated by thereflected light 80 r. The region 85 r is an approximately circularregion at least as large as the entire region in which the liquidcrystal device 10 is arranged, and the reflected light 80 r is diffusedto the entire region 85 r. Since the reflected light 80 r from theoptical element 1 is diffused to the region 85 r enclosing the liquidcrystal device 10, defects such as malfunctions originating from thereflected light 80 r concentrating on part of the liquid crystal device10 are less likely to occur.

A region 85 t in the left part of FIG. 12B is a region in which thetransmitted light 80 t is irradiated. However, as shown in the rightpart of FIG. 12B, the light intensity in the region 85 t issignificantly small compared to that of in the region 85 r. On the otherhand, in a region 87 t in the left part of FIG. 12B, the intensity ofthe transmitted light 80 t is high. As described, the transmitted light80 t from the optical element 1 is concentrated in the vicinity of thepoint of origin in the X-Y coordinate plane (i.e. a vicinity of theoptical path), and scarcely diffuses to other directions. This isattributed to the factor that the diffusion effect of the transmittedlight 80 t does not increase, since the height g of the steps 8 in thediffractive functional layer 4 is the height gr=(2m+1)λ/4n whichmaximizes the diffusion effect of the reflected light 80 r.Consequently, a significant part of the transmitted light 80 t from theoptical element 1 enters an entrance pupil D (FIG. 10) of the projectionlens 51, thereby improving the light use efficiency.

Specific examples of ranges of the diffractive light distributionoriginating from the optical element 1 will now be described. If therange of the diffractive light distribution is called “S”, then therange S of this distribution is determined by the minimum size δ (FIG.2A) of the first regions 4 a and the second regions 4 b in thediffractive functional layer 4 included in the optical element 1, aswell as by a distance L from the diffractive functional layer 4. Therelationship between the minimum size δ and the distance L is expressedas S=2λL/δ. If the distance between the diffractive functional layer 4and the liquid crystal device 10 is “L1”, then a range Sr of thereflected light 80 r at which the liquid crystal device 10 is positionedis given by Sr=2λL1/δ. If the distance between the diffractivefunctional layer 4 and the entrance pupil D of the projection lens 51 is“L2”, then a range St of the transmitted light 80 t at the entrancepupil D of the projection lens 51 is given by St=2λL2/δ. For instance,if λ=600 nm, δ=2.0 μm, L1=40 mm, and L2=50 mm, then Sr=24 mm, and St=30mm. In the case of the liquid crystal device 10 with, for instance, adiagonal diameter of 0.9 inch (approx. 23 mm), it is possible to diffusethe reflected light 80 r to the region 85 r (FIG. 12A) that encloses theentire liquid crystal device 10. This weakens the intensity of lightirradiated on the liquid crystal device 10 to a level that enables astable operation thereof. On the other hand, even if the transmittedlight 80 t diffuses in a range of St=30 mm, the diffusion effect issufficiently reduced as shown in FIG. 12B, and the transmitted light 80t concentrates in the vicinity of the optical path. Therefore,approximately the entire portion of the light beam enters the entrancepupil D of the projection lens 51.

As described, in the projector 100 in which the optical element 1 isapplied, the diffractive functional layer 4 causes the reflected light80 r to diffuse widely and thereafter reach the liquid crystal device10. Therefore, the stable operation of the liquid crystal device 10 isnot disturbed. Moreover, the diffusion of the transmitted light 80 t issufficiently suppressed, and a quantity of light reaching the screen 61is therefore merely sacrificed. Consequently, the bright, long-lastingprojector 100 is realized.

First Modification

As described above, according to the optical element 1, the diffractivefunctional layer 4 provides the reflected light 80 r with an appropriateintensity distribution and range. Here, a spatial intensity distributionof the reflected light 80 r is controlled in accordance with the shapeor the size of the liquid crystal device 10, by improving either anorder of an alignment of the concaves and convexes of the diffractivefunctional layer 4 (i.e. the arrangement of the first regions 4 a andthe second regions 4 b) or a planer shape thereof. In other words, thereflected light 80 r can be collected to a specific location.

For instance, the shapes of the first regions 4 a and the second regions4 b in the diffractive functional layer 4 are not limited to the onesillustrated in FIGS. 1A, 1B, and 3A, but may also include the shapeillustrated in FIG. 13. Referring to FIG. 13, the black regions areequivalent to the first regions 4 a, and the white regions areequivalent to the second regions 4 b.

FIGS. 14A and 14B illustrate the diffractive light intensitydistribution originating from the optical element 1 that has the patternshown in FIG. 13. Similar to FIGS. 12A and 12B described above, theFIGS. 14A and 14B respectively indicate the intensity distribution ofthe reflected light 80 r and the transmitted light 80 t. In thismodification, the region 85 r in which the reflected light 80 r isdiffracted becomes a region with a shape of a frame surrounding theliquid crystal device 10, as shown in FIG. 14A. As described, thediffusion of the reflected light 80 r in this modification is mostlyrestricted within a region that does not include the location where theliquid crystal device 10 is arranged, and hardly enters into the liquidcrystal device 10.

At the same time, as shown in FIG. 14B, the transmitted light 80 tenters the region 85 t that has, similar to the region 85 r, a shape ofa frame, as well as to the region 87 t which is in the vicinity of thepoint of origin. Here, as shown in the right part of FIG. 14B, asignificant portion of the transmitted light 80 t enters the region 87t, and the light entering into the region 85 t with a shape of a frameis only a fraction of the remaining portion of the transmitted light 80t. As described, the transmitted light 80 t from the optical element 1is concentrated in the vicinity of the point of origin in the X-Ycoordinate plane (i.e. a vicinity of the optical path), and scarcelydiffuses to other directions. This is attributed to the factor that thediffusion effect of the transmitted light 80 t does not increase, sincethe height g of the steps 8 in the diffractive functional layer 4 is theheight gr=(2m+1)λ/4n which maximizes the diffusion effect of thereflected light 80 r. The FIGS. 14A and 14B exhibit a case in which anincident light is a monochromatic light, and if the incident light has aconstant wavelength range, the borders of the region 85 r, the region 85t, and the region 87 t become blurred, widening the width of eachregion.

As described, in the optical element 1 that includes the diffractivefunctional layer 4 having the pattern shown in FIG. 13, a significantportion of the reflected light 80 r originating from the optical element1 is diffused to a region outside of where the liquid crystal device 10is arranged. Therefore, the projector 100 which uses high luminancelight reduces optical malfunctions and deteriorations of the liquidcrystal device 10 caused by the reflected light 80 r.

Similarly, adjusting the arrangement pattern of the first regions 4 aand the second regions 4 b of the diffractive functional layer 4 allowsthe diffractive intensity distribution as shown in FIGS. 15A and 15B.FIGS. 15A and 15B respectively indicate the intensity distribution ofthe reflected light 80 r and of the transmitted light 80 t. In thisexample, each region 85 r in which the reflected light 80 r is diffusedis distributed above and below the liquid crystal device 10 (FIG. 15A).Moreover, a significant portion of the transmitted light 80 t isconcentrated in the region 87 t which is in the vicinity of the opticalaxis, and a fraction of the remaining portion of light is diffused ineach region 85 t that has similar configuration as that of the region 85r. This case also allows diffusing the significant portion of thereflected light 80 r reflected by the optical element 1 to a regionoutside of where the liquid crystal device 10 is arranged. Therefore, itis possible to reduce optical malfunctions and deteriorations of theliquid crystal device 10 caused by the reflected light 80 r.

Second Modification

The projector 100 may have a structure in which a plurality of liquidcrystal devices 10 is used. FIG. 16 is a schematic drawing illustratingan optical system of the projector 100 provided with three liquidcrystal devices 10. This optical system includes a prism 53 providedwith four planes, the optical element 1 arranged to face one of theplanes of the prism 53, and the liquid crystal devices 10R, 10G, and 10Barranged so as to respectively face the other three planes of the prism53. The prism 53 refracts light beams entering from the liquid crystaldevices 10R, 10G, and 10B, and enters the light beams into the opticalelement 1. That is to say, the prism 53 is arranged in the optical pathsreaching the optical element 1 from each of the liquid crystal devices10R, 10G, and 10B. The liquid crystal devices 10R, 10G, and 10Brespectively modulate the intensity of red, green, and blue light beams.Display light is obtained by synthesizing the intensity-modulated lightbeams with the prism 53. The wire-grid polarizer 5 is arranged at eachof the liquid crystal devices 10R, 10G, and 10B, on a side opposite fromthe prism 53. The optical system described above further includes: theprojection lens 51 into which the light emitted from the optical element1 enters; mirrors 91 a, 91 b, and 91 c; and dichroic mirrors 92 a and 92b. The projection lens 51 is arranged on a line extended from theoptical path between the prism 53 and the optical element 1.

Light emitted from an-illustrated light source enters the dichroicmirror 92 a, transmitting only the blue light. This blue light istransmitted, after being reflected by the mirror 91 a, through thewire-grid polarizer 5 and thereafter the liquid crystal device 10B. Theremaining portion of light reflected by the dichroic mirror 92 a entersthe dichroic mirror 92 b, reflecting green light and transmitting redlight. This green light is transmitted through the wire-grid polarizer 5and thereafter the liquid crystal device 10G. The red light istransmitted after being reflected by the mirrors 91 b and 91 c, throughthe wire-grid polarizer 5 and thereafter the liquid crystal device 10R.The red, green, and blue light beams transmitted through the liquidcrystal devices 10R, 10G, and 10B enter the prism 53, modify theircourses, and emit toward the optical element 1.

As described, the optical element 1 transmits the incident lightcomponent that has the polarization axis orthogonal to the fine wires ofthe grid 2 so as to let the component enter the projection lens 51, and,reflects the component that has the polarization axis parallel to thefine wires of the grid 2. At this time, the diffractive functional layer4 works such that the reflected light reaches, in a widely diffusedstate, the prism 53 and thereafter the liquid crystal devices 10R, 10G,and 10B. Therefore, stable operations of the liquid crystal devices 10R,10G, and 10B are not disturbed. Moreover, the diffusion of thetransmitted light is sufficiently suppressed, and a quantity of lightreaching the screen 61 is merely sacrificed. Consequently, the bright,long-lasting projector 100 is realized.

The projector 100 may also have a structure as illustrated in FIG. 17.In this optical system, a row of mirrors including the dichroic mirrors92 a and 92 b as well as the mirror 91 b arranged in parallel to eachother is facing another row of mirrors including the mirror 91 a and thedichroic mirrors 92 c and 92 d arranged in parallel to each other.Moreover, the wire-grid polarizer 5 and the liquid crystal device 10Rare interposed between the mirror 91 a and the dichroic mirror 92 c;another wire-grid polarizer 5 and the liquid crystal device 10G areinterposed between the dichroic mirror 92 b and the dichroic mirror 91c; and another wire-grid polarizer 5 and the liquid crystal device 10Bare interposed between the dichroic mirror 92 b and the mirror 91 b. Themirrors 91 a and 91 b, as well as the dichroic mirrors 92 a, 92 b, 92 c,and 92 d are arranged at an angle of 45 degrees with respect to theliquid crystal devices 10R, 10G, and 10B. The optical element 1 and theprojection lens 51 are arranged in this order on the line extending outfrom the alignment of the dichroic mirrors 92 c and 92 d, and the screen61 is placed ahead of the projection lens 51 in the optical path.

Light emitted from an-illustrated light source enters the dichroicmirror 92 a, reflecting only the red light. This red light istransmitted, after being reflected by the mirror 91 a, through thewire-grid polarizer 5, the liquid crystal device 10R, and the dichroicmirrors 92 c and 92 d in that order, and thereafter enters the opticalelement 1. The remaining portion of light transmitted through thedichroic mirror 92 a enters the dichroic mirror 92 b, reflecting greenlight and transmitting blue light. The green light reflected by thedichroic mirror 92 b is transmitted through the wire-grid polarizer 5and then through the liquid crystal device 10G, subsequently beingreflected by the dichroic mirror 92 c, so as to be transmitted throughthe dichroic mirror 92 d, and thereafter enters the optical element 1.The blue light transmitted through the dichroic mirror 92 b istransmitted through the wire-grid polarizer 5 and then through theliquid crystal device 10B, subsequently being reflected by the mirror 91b, so as to be reflected again by the dichroic mirror 92 d, andthereafter enters the optical element 1. Consequently, all of theintensity-modulated red, green and blue light beams transmitted throughthe liquid crystal devices 10R, 10G, and 10B eventually enter theoptical element 1.

As described, the reflected light from the optical element 1 is widelydiffused by the effect of the diffractive functional layer 4. Therefore,defects of the reflected light disturbing the stable operations of theliquid crystal devices 10R, 10G, and 10B are less likely to occur.Moreover, the diffusion of the light transmitted through the opticalelement 1 is sufficiently suppressed, and thus a quantity of lightreaching the screen 61 merely sacrificed. Consequently the bright,long-lasting projector 100 is realized.

Third Modification

A substance with a refraction index larger than 1 may be deposited onthe side of the grid 2 in the optical element 1. FIG. 18 is a sectionaldrawing illustrating a state in which a SiN layer is deposited on theoptical device 1. Illustration of the sealing layer 3 (FIG. 1B) isomitted in FIG. 18.

When controlling the diffusion effect of the optical element 1, theoptimal value of the height g of the steps 8 in the diffractivefunctional layer 4 depends on a refraction index n of the surroundingmedia, as explained in formula (1). For instance, if SiN (n≈1.5) is usedas the surrounding media as illustrated in FIG. 18, the height g isreduced compared to the case of the surrounding media such as air(n≈1.0). The smaller the height g of the steps 8, the manufacturingprocesses of the grid 2 including photolithography become easier,allowing the easier manufacturing of the grid 2.

Forth Modification

A field lens 52 may be arranged as a collective lens at an optionalposition in the optical path between the optical element 1 and theprojection lens 51 in the optical system of the projector 100 as shownin FIG. 19. Arranging the field lens 52 as described allows collectingmore portion of the transmitted light 80 t from the optical element 1 tothe entrance pupil D of the projection lens 51. Consequently, the lightusage efficiency is improved.

Fifth Modification

The configuration of the first regions 4 a and the second regions 4 b inthe diffractive functional layer 4 in the above embodiment is eithersquares or shapes in which those squares are pieced together, and thefine wires included in the grid 2 are parallel to one side of thesquare, while various other structures may also be employed. FIGS. 20Ato 20C are drawings illustrating examples of a relationship between theshape of the minimum unit of the first regions 4 a and the secondregions 4 b in the diffractive functional layer 4 (hereafter referred toas “unit shape”) and the direction in which fine wires included in thegrid 2 extend.

The unit shape illustrated in FIG. 20A is square, and a side of thissquare is at an angle of 45 degrees with respect to the direction inwhich the fine wires of the grid 2 extend. In this structure, the linearborder of the unit shape is not parallel to the fine wires. Therefore,the fine wires are not formed along the steps 8 of the diffractivefunctional layer 4, thereby avoiding defects of the fine wires arrangedin the vicinity of the steps 8 to become unstable.

Unit shapes illustrated in FIGS. 20B and 20C are respectively circle andoval. In such configuration, the fine wires of the grid 2 are arrangedat an angle with respect to the periphery of the unit shape. Therefore,similar to FIG. 20A, the fine wires are formed in a stable manner.

Moreover, if the unit shape is a circle, the intensity distribution ofthe reflected light becomes isotropic. On the other hand, if the unitshape is anisotropic, for instance, rectangular or oval, the shape ofthe intensity distribution of the reflected light also becomesisotropic. In this case, the distribution widens in the direction inwhich the width of the unit shape is narrow, and contracts in thedirection in which the width of the unit shape is wide.

Sixth Modification

In the optical system of the projector 100 in the embodiment thewire-grid polarizer 5 is arranged at the side in which the light entersthe liquid crystal device 10, while the optical element 1 is arranged atthe side from which the light emits. Alternatively, two optical elements1 may be arranged at both sides, i.e. an entry side and exit side in theliquid crystal device 10.

Seventh Modification

The depth of the concaves and convexes in the diffractive functionallayer 4 may optionally be modified, according to a wavelength of anincident light. It is preferable that, according to formula (2), thedepth formed by the relief patterns in the diffractive functional layer4, i.e. the height g of the steps 8, be equal to (2m+1)λ/4n. In thisformula, if, for instance, m=0 and the wavelengths λ are set to acentral wavelength of red, green, and blue light beams, such as 650 nm,550 nm, and 450 nm, then the desirable value of the height g is obtainedas g(R)=179 nm for red light, g(G)=152 nm for green light, and g(B)=124nm for blue light. Consequently, the optical element 1 that is arrangedfacing the liquid crystal devices 10R, 10G, and 10B, obtains thediffractive functional layer 4 suitable for the wavelength of theincident light, and efficiently diffuses light by setting the height gof the steps 8 in the diffractive functional layer 4 in the abovemanner.

Eighth Modification

The light source of the projector 100 may be a laser. The half bandwidthof the wavelength spectrum is extremely narrow in laser light, andtherefore light is controlled by the diffractive functional layer 4 in asuitable manner.

Ninth Modification

In the above embodiment, the optical element 1 is applied to theprojector 100, while the projector 100 is one of the various examplesfor the application of the optical element 1. Another example include,for instance, a mobile liquid crystal displays that requires diffractivefunctional layers.

1. An optical element, comprising: a diffractive functional layer whichdiffracts at least part of incident light; and a grid formed on a firstsurface of the diffractive functional layer, the grid including aplurality of fine wires and having a polarization separation function,wherein the optical element reflects a part of the incident light whiletransmitting another part of the incident light; and the first surfaceof the diffractive functional layer includes: a plurality of firstregions; a plurality of second regions, a height thereof relative to asecond surface of the diffractive functional layer being different froma height of the first regions, the second surface being an oppositesurface to the first surface; and a step provided at a border betweenthe first regions and the second regions.
 2. A projection display devicecomprising an optical element according to claim
 1. 3. An opticalelement, comprising: a diffractive functional layer which diffracts atleast part of incident light; and a grid formed on a first surface ofthe diffractive functional layer, the grid including a plurality of finewires and having a polarization separation function, wherein the opticalelement reflects a part of the incident light while transmitting anotherpart of the incident light; and the first surface of the diffractivefunctional layer includes: a plurality of regions having a differentheight relative to a second surface of the diffractive functional layer,the second surface being an opposite surface to the first surface; and astep provided at a border between the plurality of regions.
 4. Theoptical element according to claim 3, wherein the plurality of regionshaving a different height has a distribution within the optical element,and wherein the difference of height relative to the second surface ofthe optical element in the plurality of regions having a differentheight is (2m+1)λ/4n, where m being an integer greater than or equal tozero, λ being a wavelength of the incident light, and n being arefraction index of the optical element.
 5. The optical elementaccording to claim 3, wherein the plurality of regions having adifferent height has a distribution within the optical element, andwherein the difference of height relative to the second surface of theoptical element in the plurality of regions having a different height is(m+1)λ/(N−1), where m being an integer greater than or equal to zero, λbeing a wavelength of the incident light, and N being a refraction indexof the optical element.
 6. A projection display device, comprising: aliquid crystal device; a projection lens; and an optical elementarranged at a position in an optical path from the liquid crystal deviceto the projection lens; the optical element including: a diffractivefunctional layer which diffracts at least part of incident light; and agrid formed on a first surface of the diffractive functional layer, thegrid including a plurality of fine wires and having a polarizationseparation function, wherein the first surface of the diffractivefunctional layer includes: a plurality of first regions; a plurality ofsecond regions, a height thereof, relative to a second surface of thediffractive functional layer, being different from a height of the firstregion; and a step provided at a border between the first regions andthe second regions.
 7. The projection display device according to claim6, wherein the height relative to the second surface in the firstregions of the optical element is different from a height of the secondregions by (2m+1)λ/4n, where m being an integer greater than or equal tozero, λ being a wavelength of the incident light, and n being arefraction index of the optical element.
 8. The projection displaydevice according to claim 6, further comprising a prism arranged at aposition in the optical path from the liquid crystal device to theoptical element.
 9. The projection display device according to claim 6,further comprising a collective lens arranged at a position in theoptical path from the optical element to the projection lens.
 10. Anoptical element, comprising: a grid that receives a first light, andthat reflects a second light while transmitting a third light, thesecond light being a first part of the first light, the third lightbeing a second part of the first light; and a diffractive material thatdiffracts the third light; the grid including a plurality of metalbodies; the diffractive material including a first region and a secondregion; the first region having a first surface and a third surface, thethird surface being an opposite surface of the first surface; the secondregion having a second surface and the third surface, the third surfacebeing an opposite surface of the second surface; and a distance betweenthe first surface and the third surface being different from a distancebetween the second surface and the third surface.
 11. The opticalelement according to claim 10, wherein the distance between the firstsurface and the third surface in the first region of the optical elementis different from the distance between the second surface and the thirdsurface of the second region by (2m+1)λ/4n, where m being an integergreater than or equal to zero, λ being a wavelength of the incidentlight, and n being a refraction index of the optical element.
 12. Theoptical element according to claim 10, wherein the distance between thefirst surface and the third surface in the first region of the opticalelement is different from the distance between the second surface andthe third surface of the second regions by (m+1)λ/(N−1), where m beingan integer greater than or equal to zero, λ being the wavelength of theincident light, and N being a refraction index of the diffractivefunctional layer.
 13. The optical element according to claim 10, whereina plane defined by the first surface and a plane defined by the secondsurface are in parallel.
 14. The optical element according to claim 10,wherein a plurality of the first regions are irregularly arrangedthroughout the diffractive material.
 15. The optical element accordingto claim 14, further comprising a plurality of unit patterns, each ofthe unit patterns including the plurality of the first regions and aplurality of the second regions arranged in a specified irregulardistribution.
 16. The optical element according to claim 15, whereindirections of the unit patterns adjacent to one another are differentfrom each other.
 17. The optical element according to claim 10, whereina periphery of the first region and a periphery of the second regionrespectively include a straight line, and wherein the metal bodies arefine wires that are arranged at an angle to the straight line.
 18. Theoptical element according to claim 10, wherein the diffractive materialis formed of a material different from a material of the grid, thematerial of the diffractive functional layer having translucency. 19.The optical element according to claim 18, further comprising anadhesive layer formed between the diffractive material and the grid, theadhesive layer being formed with a material different from a material ofthe diffractive material and a material of the grid, wherein an adhesivestrength between the diffractive material and the adhesive layer, aswell as an adhesive strength between the grid and the adhesive layer arehigher than that of between the diffractive material and the grid.
 20. Aprojection display device comprising an optical element according toclaim 10.